Optical properties of ZnO: Al films prepared by reactive dc magnetron sputtering

S. Ghosh, A. Sarkar, S. Chaudhuri, AK Pal

Research output: Contribution to journalArticlepeer-review

11 Scopus citations


Aluminium doped zinc oxide (ZnO : Al) films prepared by dc magnetron sputtering were studied in the spectral range of 300-1400 nm. The effect of post deposition heat treatments in air and in a hydrogen atmosphere on the optical properties were studied critically. The variation of refractive indices and extinction coefficients, along with the band gap due to the above, were correlated with the microstructures of the films. The presence of trap states at the grain boundaries and the number of charge carriers due to oxygen vacancies arising from absorption or desorption of oxygen seems to control the optical data in these films.

Original languageEnglish
Pages (from-to)645-648
Number of pages4
Issue number10-11
StatePublished - 1 Jan 1991
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films


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