Oxidation of microcrystalline Si:H:CI films

E. Grossman; A. Grill; M. Polak

doi:10.1116/1.574546

Oxidation of microcrystalline Si:H:CI films

E. Grossman, A. Grill, M. Polak

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Original language	English
Pages (from-to)	1680-1683
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	5
Issue number	4
DOIs	https://doi.org/10.1116/1.574546
State	Published - 1 Jul 1987

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Oxidation of microcrystalline Si:H:CI films",

author = "E. Grossman and A. Grill and M. Polak",

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AU - Grill, A.

AU - Polak, M.

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Oxidation of microcrystalline Si:H:CI films

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