Parallel array of planar Hall effect sensors for high resolution magnetometry

Hariharan Nhalil, Moty Schultz, Shai Amrusi, Asaf Grosz, Lior Klein

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

We introduce a planar Hall effect magnetometer in the form of a parallel array of permalloy-based elliptical sensors. The number of ellipses in the array and other fabrication parameters are optimized with the support of numerical simulations. We obtain equivalent magnetic noise (EMN) of 16 pT/Hz at 100 Hz, 25 pT/Hz at 10 Hz, 98 pT/Hz at 1 Hz, and 470 pT/Hz at 0.1 Hz. The exceptional EMN without the use of magnetic flux concentrators highlights the advantages of the design. The presented magnetometer, characterized by its simplicity, affordability, and ability to operate at room temperature, is anticipated to be useful for applications requiring pT resolution.

Original languageEnglish
Article number204501
JournalJournal of Applied Physics
Volume133
Issue number20
DOIs
StatePublished - 28 May 2023

ASJC Scopus subject areas

  • General Physics and Astronomy

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