Particle resuspension by air jets-application to clean rooms

C. Gutfinger, G. Ziskind

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

In this study, the use of focused high-speed air jets to cause removal of particulates from wafer surfaces was investigated. Two sets of experiments were carried out. The first used a continuous air jet, while the second employed a pulsed jet with three different air velocities. The results reveal that particle removal efficiency depends on the frequency of the jet.

Original languageEnglish
Pages (from-to)S537-S538
JournalJournal of Aerosol Science
Volume30
Issue numberSuppl. 1
DOIs
StatePublished - 1 Jan 1999
Externally publishedYes
EventProceedings of the 1999 European Aerosol Conference - Prague, Czech Republic
Duration: 6 Sep 199910 Sep 1999

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