Abstract
Diamond-like carbon (DLC) films, used as molds for nanoimprint lithography, were treated with a fluorocarbon-based plasma in order to enhance their anti-adhesion properties. While ellipsometry and atomic force microscope measurements showed negligible changes in thickness and surface roughness after plasma processing, contact angle measurement found fluorine plasma-treated DLC surfaces to be highly hydrophobic, with surface energy values reduced from ∼45mJm-2 for untreated films to ∼20-30mJm-2 after fluorination. X-ray photoelectron spectroscopy revealed a thin (from ∼0.5 to ∼3nm) fluorocarbon layer on the DLC surface. Proposed mechanisms for the formation of this layer include two competing processes: etching of DLC and deposition of fluorocarbon material, with one or the other mechanism dominant, depending on the plasma conditions. Fluorocarbon plasma-treated DLC molds for nanoimprint lithography were used to pattern sub-20nm size features with a high degree of repeatability, demonstrating an extended lifetime of the anti-adhesion coating.
| Original language | English |
|---|---|
| Article number | 145306 |
| Journal | Nanotechnology |
| Volume | 20 |
| Issue number | 14 |
| DOIs | |
| State | Published - 12 May 2009 |
| Externally published | Yes |
ASJC Scopus subject areas
- Bioengineering
- General Chemistry
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering