Keyphrases
Carbon Surface
100%
Diamond-like
100%
Surface Reaction Mechanism
100%
Nanoimprint Lithography
100%
Surface Application
100%
Plasma Fluorination
100%
Fluorocarbon
50%
Plasma Treatment
33%
Ellipsometry
16%
X-ray Photoelectron Spectroscopy
16%
Atomic Force Microscope
16%
Surface Roughness
16%
Surface Energy
16%
Repeatability
16%
Contact Angle Measurement
16%
Superhydrophobic
16%
Fluorination
16%
Competition Process
16%
Carbon Film
16%
Energy Value
16%
Anti-adhesion Coating
16%
Plasma Processing
16%
Anti-adhesion Property
16%
Plasma Condition
16%
Sub-20 Nm
16%
Extended Life
16%
Fluorocarbon Plasma
16%
Change in Thickness
16%
Fluorine Plasma
16%
Microscope Measurement
16%
Material Science
Carbon Surface
100%
Lithography
100%
Diamond-Like Carbon
100%
Film
20%
X-Ray Photoelectron Spectroscopy
20%
Surface Roughness
20%
Contact Angle
20%
Surface Energy
20%
Diamond Like Carbon Films
20%
Engineering
Nanoimprint Lithography
100%
Diamond-Like Carbon
100%
Hydrophobic
16%
Calorific Value
16%
Ray Photoelectron Spectroscopy
16%
Atomic Force Microscope
16%
Repeatability
16%
Feature Size
16%
Contact Angle Measurement
16%
Competing Process
16%
Plasma Applications
16%