Portable spatially incoherent holography for optical profiling of sharp-edge objects

Amit Nativ; Natan T. Shaked

doi:10.1364/DH.2016.DTh3C.5

Portable spatially incoherent holography for optical profiling of sharp-edge objects

Amit Nativ, Natan T. Shaked

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present a compact and external common-path off-axis interferometer with spatially incoherent illumination, and demonstrate using it for profiling semiconductor silicon wafers with sharp-edge contacts.

Original language	English
Title of host publication	Digital Holography and Three-Dimensional Imaging, DH 2016
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580156
DOIs	https://doi.org/10.1364/DH.2016.DTh3C.5
State	Published - 18 Jul 2016
Externally published	Yes
Event	Digital Holography and Three-Dimensional Imaging, DH 2016 - Heidelberg, Germany Duration: 25 Jul 2016 → 28 Jul 2016

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Digital Holography and Three-Dimensional Imaging, DH 2016
Country/Territory	Germany
City	Heidelberg
Period	25/07/16 → 28/07/16

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Access to Document

10.1364/DH.2016.DTh3C.5

Cite this

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title = "Portable spatially incoherent holography for optical profiling of sharp-edge objects",

abstract = "We present a compact and external common-path off-axis interferometer with spatially incoherent illumination, and demonstrate using it for profiling semiconductor silicon wafers with sharp-edge contacts.",

author = "Amit Nativ and Shaked, {Natan T.}",

note = "Publisher Copyright: {\textcopyright} OSA 2016.; Digital Holography and Three-Dimensional Imaging, DH 2016 ; Conference date: 25-07-2016 Through 28-07-2016",

year = "2016",

month = jul,

day = "18",

doi = "10.1364/DH.2016.DTh3C.5",

language = "English",

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booktitle = "Digital Holography and Three-Dimensional Imaging, DH 2016",

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Nativ, A & Shaked, NT 2016, Portable spatially incoherent holography for optical profiling of sharp-edge objects. in Digital Holography and Three-Dimensional Imaging, DH 2016. Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), Digital Holography and Three-Dimensional Imaging, DH 2016, Heidelberg, Germany, 25/07/16. https://doi.org/10.1364/DH.2016.DTh3C.5

TY - GEN

T1 - Portable spatially incoherent holography for optical profiling of sharp-edge objects

AU - Nativ, Amit

AU - Shaked, Natan T.

PY - 2016/7/18

Y1 - 2016/7/18

N2 - We present a compact and external common-path off-axis interferometer with spatially incoherent illumination, and demonstrate using it for profiling semiconductor silicon wafers with sharp-edge contacts.

AB - We present a compact and external common-path off-axis interferometer with spatially incoherent illumination, and demonstrate using it for profiling semiconductor silicon wafers with sharp-edge contacts.

UR - http://www.scopus.com/inward/record.url?scp=85165791911&partnerID=8YFLogxK

U2 - 10.1364/DH.2016.DTh3C.5

DO - 10.1364/DH.2016.DTh3C.5

M3 - Conference contribution

AN - SCOPUS:85165791911

SN - 9781943580156

T3 - Optics InfoBase Conference Papers

BT - Digital Holography and Three-Dimensional Imaging, DH 2016

PB - Optica Publishing Group (formerly OSA)

T2 - Digital Holography and Three-Dimensional Imaging, DH 2016

Y2 - 25 July 2016 through 28 July 2016

ER -

Portable spatially incoherent holography for optical profiling of sharp-edge objects

Abstract

Publication series

Conference

ASJC Scopus subject areas

Access to Document

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