Post-hydrogenation of amorphous hydrogenated silicon films modified by femtosecond laser irradiation

M. Khenkin, Andrey Emelyanov, Andrei G. Kazanskii, P. Forsh, O. Kon'kov, M. Beresna, M. Gecevicius, P. Kazansky

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations


Crystallization of amorphous hydrogenated silicon thin films with femtosecond laser pulses is a currently developable technique for nanocrystalline silicon production for optoelectronics applications. The significant drawback of this technology is the hydrogen losses upon laser treatment of the film, while certain hydrogen concentration is essential to obtain high-quality material. Therefore we aimed to study the effect of post-hydrogenation of laser-modified amorphous silicon films on their hydrogen content and photoelectric properties. Using laser pulses of different fluence we obtained two-phase films with different crystalline volume fraction up to 60%. Post-hydrogenation procedure was found to partially compensate hydrogen out-diffusion and remarkably increase photoconductivity of highly crystallized films. At the same time the contribution of nanocrystalline phase to the total films' photoconductivity substantially increases. The results points out the effectiveness of applied hydrogenation procedure for a production of laser crystallized amorphous silicon films with suitable properties for optoelectronics.

Original languageEnglish
Title of host publicationPhotonics for Solar Energy Systems V
ISBN (Print)9781628410884
StatePublished - 1 Jan 2014
Externally publishedYes
EventPhotonics for Solar Energy Systems V - Brussels, Belgium
Duration: 14 Apr 201416 Apr 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferencePhotonics for Solar Energy Systems V


  • amorphous silicon
  • femtosecond laser crystallization
  • nanocrystalline silicon
  • photoconductivity
  • post-hydrogenation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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