Post-hydrogenation of amorphous hydrogenated silicon films modified by femtosecond laser irradiation

M. Khenkin, Andrey Emelyanov, Andrei G. Kazanskii, P. Forsh, O. Kon'kov, M. Beresna, M. Gecevicius, P. Kazansky

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

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