Process for creating a 3-dimensional configuration on a substrate

Levi Gheber (Inventor), Rodica Ionescu (Inventor), Robert Steven Marks (Inventor), Rodica Ionescu (Inventor)

Research output: Patent


The invention provides a process for introducing a three-dimensional configuration of micron to sub-micron size in a polymeric substrate comprising applying a catalyst for the selective removal of sub-unit parts of the polymer to at least one predetermined area of the polymer substrate via a pipette with a nano-sized orifice.

Original languageEnglish
Patent numberUS2005118673
IPCH01L 21/ 00 A I
Priority date2/12/03
StatePublished - 2 Jun 2005


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