Abstract
The invention provides a process for introducing a three-dimensional configuration of micron to sub-micron size in a polymeric substrate comprising applying a catalyst for the selective removal of sub-unit parts of the polymer to at least one predetermined area of the polymer substrate via a pipette with a nano-sized orifice.
Original language | English |
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Patent number | US2005118673 |
IPC | H01L 21/ 00 A I |
Priority date | 2/12/03 |
State | Published - 2 Jun 2005 |