| Original language | English |
|---|---|
| Patent number | IL159155 |
| IPC | H01L 21/ 00 A I |
| Priority date | 2/12/03 |
| State | Published - 11 Feb 2009 |
PROCESS FOR CREATING A THREE-DIMENSIONAL CONFIGURATION ON A SUBSTRATE
Gheber Levi (Inventor), Marks Robert (Inventor), Lonescu Rodica (Inventor)
Research output: Patent