| Original language | English |
|---|---|
| Patent number | IL159155 |
| IPC | H01L 21/ 00 A I |
| Priority date | 2/12/03 |
| State | Published - 11 Feb 2009 |
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PROCESS FOR CREATING A THREE-DIMENSIONAL CONFIGURATION ON A SUBSTRATE
- Gheber Levi (Inventor)
- , Marks Robert (Inventor)
- , Lonescu Rodica (Inventor)
Research output: Patent