@inproceedings{3d24c41e93c44ca2bd52d66b4cea4735,
title = "Pulsed closed field unbalanced magnetron sputtering (P-CFUBMS) deposited TiC/a:C thin films",
abstract = "TiC/a:C nanocomposite thin film has proven to be a worthy material selection as a thin film for tribological applications due to its low coefficient of friction, good wear resistance and high hardness. In the current study TiC/a:C thin films with carbon concentration near 55-62 at \% were deposited via pulsed closed field unbalanced magnetron sputtering (P-CFUBMS) in pure argon atmosphere with different substrate bias voltages and onto 440C stainless steel substrate with different substrate roughness. It was found that the TiC/a:C film hardness and elastic modulus were increased from 18.5 GPa to 33.8 GPa by increasing the substrate bias from floating to -150 V. However higher substrate bias can also decrease the film tibological properties. The substrate roughness has a strong effect on TiC/a:C film wear behavior. When the Ra (Mean surface roughness values) is less than 110 nm, the COF values are in low range (0.18-0.28). Further increase the Ra value to above 300 nm will result in a higher COF (>0.33). Films deposited on higher surface roughness substrate need longer time to reach the sliding equilibrium state.",
keywords = "Magnetron sputtering, Nanocomposite film, Substrate bias, TiC/a:C, Wear resistance",
author = "Jianliang Lin and Brajendra Mishra and Malki Pinkas and Moore, \{J. John\}",
year = "2007",
month = jan,
day = "1",
doi = "10.4028/0-87849-462-6.1177",
language = "English",
isbn = "0878494626",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
number = "PART 2",
pages = "1177--1180",
booktitle = "Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6",
edition = "PART 2",
note = "6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 ; Conference date: 05-11-2007 Through 09-11-2007",
}