Real time parallel phase shift orthogonal polarization interference microscopy

I. Abdulhalim, A. Safrani

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations


A real time phase shift interference microscopy system is presented using a polarization based Linnik interferometer operating with three synchronized, phase masked, parallel detectors. Using this method, several important applications which require high speed and accuracy are demonstrated in 50 volumes per seconds and 2nm height repeatability, dynamic focusing control, fast sub-nm vibrometry, tilt measurement, submicron roughness measurement, 3D profiling of fine structures and micro-bumps height uniformity in an integrated semiconductor chip. Using multiple wavelengths approach we demonstrated phase unwrapped images with topography exceeding few microns.

Original languageEnglish
Title of host publicationInterferometry XVIII
EditorsArmando Albertazzi Goncalves, Katherine Creath, Jan Burke
ISBN (Electronic)9781510603110
StatePublished - 1 Jan 2016
EventInterferometry XVIII - San Diego, United States
Duration: 30 Aug 20161 Sep 2016

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceInterferometry XVIII
Country/TerritoryUnited States
CitySan Diego


  • 3D imaging
  • Interference microscopy
  • micro-bumps and TSV inspection
  • optical coherence tomography
  • optical metrology
  • phase shift interferometry
  • profilometry

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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