Real time parallel phase shift orthogonal polarization interference microscopy

I. Abdulhalim; A. Safrani

doi:10.1117/12.2237473

Real time parallel phase shift orthogonal polarization interference microscopy

I. Abdulhalim, A. Safrani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

A real time phase shift interference microscopy system is presented using a polarization based Linnik interferometer operating with three synchronized, phase masked, parallel detectors. Using this method, several important applications which require high speed and accuracy are demonstrated in 50 volumes per seconds and 2nm height repeatability, dynamic focusing control, fast sub-nm vibrometry, tilt measurement, submicron roughness measurement, 3D profiling of fine structures and micro-bumps height uniformity in an integrated semiconductor chip. Using multiple wavelengths approach we demonstrated phase unwrapped images with topography exceeding few microns.

Original language	English
Title of host publication	Interferometry XVIII
Editors	Armando Albertazzi Goncalves, Katherine Creath, Jan Burke
Publisher	SPIE
ISBN (Electronic)	9781510603110
DOIs	https://doi.org/10.1117/12.2237473
State	Published - 1 Jan 2016
Event	Interferometry XVIII - San Diego, United States Duration: 30 Aug 2016 → 1 Sep 2016

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9960
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Interferometry XVIII
Country/Territory	United States
City	San Diego
Period	30/08/16 → 1/09/16

Keywords

3D imaging
Interference microscopy
micro-bumps and TSV inspection
optical coherence tomography
optical metrology
phase shift interferometry
profilometry

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2237473

Cite this

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title = "Real time parallel phase shift orthogonal polarization interference microscopy",

abstract = "A real time phase shift interference microscopy system is presented using a polarization based Linnik interferometer operating with three synchronized, phase masked, parallel detectors. Using this method, several important applications which require high speed and accuracy are demonstrated in 50 volumes per seconds and 2nm height repeatability, dynamic focusing control, fast sub-nm vibrometry, tilt measurement, submicron roughness measurement, 3D profiling of fine structures and micro-bumps height uniformity in an integrated semiconductor chip. Using multiple wavelengths approach we demonstrated phase unwrapped images with topography exceeding few microns.",

keywords = "3D imaging, Interference microscopy, micro-bumps and TSV inspection, optical coherence tomography, optical metrology, phase shift interferometry, profilometry",

author = "I. Abdulhalim and A. Safrani",

note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; Interferometry XVIII ; Conference date: 30-08-2016 Through 01-09-2016",

year = "2016",

month = jan,

day = "1",

doi = "10.1117/12.2237473",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Goncalves, {Armando Albertazzi} and Katherine Creath and Jan Burke",

booktitle = "Interferometry XVIII",

address = "United States",

}

Real time parallel phase shift orthogonal polarization interference microscopy. / Abdulhalim, I.; Safrani, A.
Interferometry XVIII. ed. / Armando Albertazzi Goncalves; Katherine Creath; Jan Burke. SPIE, 2016. 996002 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9960).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Real time parallel phase shift orthogonal polarization interference microscopy

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AU - Safrani, A.

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N2 - A real time phase shift interference microscopy system is presented using a polarization based Linnik interferometer operating with three synchronized, phase masked, parallel detectors. Using this method, several important applications which require high speed and accuracy are demonstrated in 50 volumes per seconds and 2nm height repeatability, dynamic focusing control, fast sub-nm vibrometry, tilt measurement, submicron roughness measurement, 3D profiling of fine structures and micro-bumps height uniformity in an integrated semiconductor chip. Using multiple wavelengths approach we demonstrated phase unwrapped images with topography exceeding few microns.

AB - A real time phase shift interference microscopy system is presented using a polarization based Linnik interferometer operating with three synchronized, phase masked, parallel detectors. Using this method, several important applications which require high speed and accuracy are demonstrated in 50 volumes per seconds and 2nm height repeatability, dynamic focusing control, fast sub-nm vibrometry, tilt measurement, submicron roughness measurement, 3D profiling of fine structures and micro-bumps height uniformity in an integrated semiconductor chip. Using multiple wavelengths approach we demonstrated phase unwrapped images with topography exceeding few microns.

KW - 3D imaging

KW - Interference microscopy

KW - micro-bumps and TSV inspection

KW - optical coherence tomography

KW - optical metrology

KW - phase shift interferometry

KW - profilometry

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U2 - 10.1117/12.2237473

DO - 10.1117/12.2237473

M3 - Conference contribution

AN - SCOPUS:85002410298

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Interferometry XVIII

A2 - Goncalves, Armando Albertazzi

A2 - Creath, Katherine

A2 - Burke, Jan

PB - SPIE

T2 - Interferometry XVIII

Y2 - 30 August 2016 through 1 September 2016

ER -

Real time parallel phase shift orthogonal polarization interference microscopy

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

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