Real-time phase shift interference microscopy

Avner Safrani, Ibrahim Abdulhalim

Research output: Contribution to journalArticlepeer-review

40 Scopus citations

Abstract

A real-time phase shift interference microscopy system is presented using a polarization-based Linnik interferometer operating with three synchronized, phase-masked, parallel detectors. Using this method, several important applications that require high speed and accuracy, such as dynamic focusing control, tilt measurement, submicrometer roughness measurement, and 3D profiling of fine structures, are demonstrated in 50 volumes per second and with 2 nm height repeatability.

Original languageEnglish
Pages (from-to)5220-5223
Number of pages4
JournalOptics Letters
Volume39
Issue number17
DOIs
StatePublished - 1 Jan 2014

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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