Real-time phase shift interference microscopy

Keyphrases

• Interference Microscopy 100%
• Phase-shifting Interference 100%
• Repeatability 50%
• Sub-micrometer 50%
• Microscopy System 50%
• Dynamic Focusing 50%
• Roughness Measurement 50%
• Focus Control 50%
• Linnik Interferometer 50%
• Tilt Measurement 50%
• 3D Profiling 50%

Engineering

• Phase Shift 100%
• Repeatability 50%