RF heating of conducting film/silicon substrate structure: The heat explosion theory approach

Keyphrases

• Silicon Substrate 100%
• Substrate Structure 100%
• Thin-film Silicon 100%
• RF Heating 100%
• Heat Explosion 100%
• Conductive Film 100%
• RF Magnetic Field 66%
• Heat Transfer 33%
• Metal Film 33%
• Technological Process 33%
• Film Thickness 33%
• Temperature Rise 33%
• Dissipated Power 33%
• Analytical Form 33%
• Finite Temperature 33%
• Structure Parameters 33%
• Thermal Parameters 33%
• Sheet Resistance 33%
• Silicon Structure 33%
• Silicide 33%
• Metal Nitrides 33%
• Conducting Layer 33%
• Power Loss 33%
• Eddy Current 33%
• Current Transfer 33%
• Heating Kinetics 33%
• New Phase Formation 33%
• Specimen Dimension 33%
• Metal Borides 33%
• Metal Silicide 33%

Material Science

• Silicon 100%
• Conductive Film 100%
• Silicide 66%
• Film 33%
• Metal Film 33%
• Film Thickness 33%
• Nitride Compound 33%
• Boride 33%

Chemical Engineering

• Silicide 100%
• Nitride 50%
• Sheet Resistance 50%
• Borides 50%