Scheduling preventive maintenance within a queue time for maximum throughput in semiconductor manufacturing

Adar A. Kalir, Israel Tirkel

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations


We address the PM-QT problem, of scheduling preventive maintenance (PM) activities on tools within queue time (QT) restrictions, such that the overall throughput is maximized and the QT restrictions are not violated. Despite the increased occurrences of QT in semiconductor manufacturing, this problem has not been explicitly addressed. We formulate this problem as a mixed integer linear program (MILP) and propose a cross-entropy (CE) heuristic approach for its efficient solution. We show that the CE solutions are indeed efficient in runtime reductions with almost no compromise of the solution's quality (less than 1% difference between MILP and CE solutions for large scale problems).

Original languageEnglish
Title of host publication2016 Winter Simulation Conference
Subtitle of host publicationSimulating Complex Service Systems, WSC 2016
EditorsTheresa M. Roeder, Peter I. Frazier, Robert Szechtman, Enlu Zhou
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages12
ISBN (Electronic)9781509044863
StatePublished - 2 Jul 2016
Event2016 Winter Simulation Conference, WSC 2016 - Arlington, United States
Duration: 11 Dec 201614 Dec 2016

Publication series

NameProceedings - Winter Simulation Conference
ISSN (Print)0891-7736


Conference2016 Winter Simulation Conference, WSC 2016
Country/TerritoryUnited States

ASJC Scopus subject areas

  • Software
  • Modeling and Simulation
  • Computer Science Applications


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