@inproceedings{f990e8255e9b4051b65c7320caba899f,
title = "Sheet Resistance Measurement of Thin Metal Films Using Reflection-Mode THz-TDS",
abstract = "Micro four-point probe technology can reliably be used to measure the sheet resistance of thin metal films, with great accuracy and repeatability. In this work, we investigate the suitability of using reflection-mode teraherz time-domain spectroscopy for the same task. The agreement between the two methods places reflection-mode terahertz time-domain spectroscopy as a viable tool for thin metal film analysis.",
author = "Roy Kelner and Buron, \{Jonas Due\} and Jepsen, \{Peter Uhd\}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE; 46th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2021 ; Conference date: 30-08-2021 Through 03-09-2021",
year = "2021",
month = jan,
day = "1",
doi = "10.1109/IRMMW-THz50926.2021.9567339",
language = "English",
series = "International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz",
publisher = "Institute of Electrical and Electronics Engineers",
booktitle = "2021 46th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2021",
address = "United States",
}