Silicon-containing coatings produced by a chemical vapour deposition method on nickel-based superalloys

Keyphrases

• Temperature Range 100%
• Chemical Vapor Deposition Method 100%
• Nickel-based Superalloy 100%
• Silicon-containing 100%
• Graphite 50%
• Total Flow 50%
• Reactor 50%
• Molar Ratio 50%
• X Ray Diffraction 50%
• Am(III) 50%
• Two-layer 50%
• Gas Mixture 50%
• SiCl4 50%
• Atmospheric Pressure 50%
• Chemical Vapor Deposition Technique 50%
• Silicide Phase 50%
• RF Generator 50%
• Susceptor 50%
• NiSi 50%
• Pure Silicon 50%
• Ni3Si 50%
• G-phase 50%
• Hastelloy X 50%

Material Science

• Silicon 100%
• Chemical Vapor Deposition 100%
• Nickel-Based Superalloys 100%
• X-Ray Diffraction 33%
• Gas Mixture 33%
• Silicide 33%
• Hastelloy 33%