Simulation studies on model selection in pm planning optimization

Minho Lee, James R. Morrison, Adar A. Kalir

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

In semiconductor manufacturing, preventive maintenance (PM) is complicated and essential. Since tool down time contributes significantly to manufacturing flow variability and thus mean cycle time, effective PM planning is important. Here we extend existing PM planning methods to allow for four categories of PM models. We study the quality of these PM models and the resulting optimized PM plans via simulation. We observe that the approximate mean cycle time formulae for these models are generally of good accuracy. Our studies show that good PM plans suggested from the use of these approximate formulae remain good plans in the true system. Finally, we study the implications of using optimized PM plans generated from one type of model in another type of model. The results suggest that good PM plans are relatively insensitive to which of the four PM models are selected.

Original languageEnglish
Title of host publication2015 Winter Simulation Conference, WSC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2929-2940
Number of pages12
ISBN (Electronic)9781467397438
DOIs
StatePublished - 16 Feb 2016
Externally publishedYes
EventWinter Simulation Conference, WSC 2015 - Huntington Beach, United States
Duration: 6 Dec 20159 Dec 2015

Publication series

NameProceedings - Winter Simulation Conference
Volume2016-February
ISSN (Print)0891-7736

Conference

ConferenceWinter Simulation Conference, WSC 2015
Country/TerritoryUnited States
CityHuntington Beach
Period6/12/159/12/15

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