Spatial-phase-shift imaging interferometry using a spectrally modulated white light source

Shlomi Epshtein, Alon Harris, Igor Yaacobovitz, Garrett Locketz, Yitzhak Yitzhaky, Yoel Arieli

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

An extension of the white light spatial-phase-shift (WLSPS) for object surface measurements is described. Using WLSPS, surface measurements can be obtained from any real object image without the need of a reference beam, thus achieving inherent vibration cancellation. The surface topography is obtained by acquiring multiple images of an object illuminated by a spectrally modulated white light source and using an appropriate algorithm. The modulation of the light source obviates the need for the continuous phase delay to obtain the interferograms.

Original languageEnglish
Pages (from-to)6966-6968
Number of pages3
JournalOptics Letters
Volume39
Issue number24
DOIs
StatePublished - 15 Dec 2014

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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