Sputtering and roughness of the (0 01), (01 1) and (111) copper single-crystal planes

D. Moreno, D. Eliezer

Research output: Contribution to journalArticlepeer-review

7 Scopus citations
Original languageEnglish
Pages (from-to)1591-1593
Number of pages3
JournalJournal of Materials Science Letters
Volume13
Issue number21
DOIs
StatePublished - 1 Jan 1994

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