STEM Energy-Dispersive X-ray Spectroscopy for Quantitative Compositional Metrology in ULSI Technology

Daniel Fishman; Adham Basha; Amram Azulay; Amit Kohn

doi:10.1093/mam/ozae044.590

STEM Energy-Dispersive X-ray Spectroscopy for Quantitative Compositional Metrology in ULSI Technology

Daniel Fishman, Adham Basha, Amram Azulay, Amit Kohn

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	1184-1185
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	30
Issue number	2024
DOIs	https://doi.org/10.1093/mam/ozae044.590
State	Published - 24 Jul 2024
Externally published	Yes
Event	82nd Annual Meeting Microscopy Society of America and the 58th Annual Meeting Microanalysis Society, M and M 2024 - Cleveland, United States Duration: 28 Jul 2024 → 1 Aug 2024

ASJC Scopus subject areas

Instrumentation

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10.1093/mam/ozae044.590

Cite this

@article{74067c796eaa432bbaae88a44dce9405,

title = "STEM Energy-Dispersive X-ray Spectroscopy for Quantitative Compositional Metrology in ULSI Technology",

author = "Daniel Fishman and Adham Basha and Amram Azulay and Amit Kohn",

year = "2024",

month = jul,

day = "24",

doi = "10.1093/mam/ozae044.590",

language = "English",

volume = "30",

pages = "1184--1185",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

number = "2024",

note = "82nd Annual Meeting Microscopy Society of America and the 58th Annual Meeting Microanalysis Society, M and M 2024 ; Conference date: 28-07-2024 Through 01-08-2024",

}

TY - JOUR

T1 - STEM Energy-Dispersive X-ray Spectroscopy for Quantitative Compositional Metrology in ULSI Technology

AU - Fishman, Daniel

AU - Basha, Adham

AU - Azulay, Amram

AU - Kohn, Amit

PY - 2024/7/24

Y1 - 2024/7/24

UR - http://www.scopus.com/inward/record.url?scp=85215657818&partnerID=8YFLogxK

U2 - 10.1093/mam/ozae044.590

DO - 10.1093/mam/ozae044.590

M3 - Conference article

AN - SCOPUS:85215657818

SN - 1431-9276

VL - 30

SP - 1184

EP - 1185

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - 2024

T2 - 82nd Annual Meeting Microscopy Society of America and the 58th Annual Meeting Microanalysis Society, M and M 2024

Y2 - 28 July 2024 through 1 August 2024

ER -

STEM Energy-Dispersive X-ray Spectroscopy for Quantitative Compositional Metrology in ULSI Technology

ASJC Scopus subject areas

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