Structural analysis of (Ti_1-xAl_x)N graded coatings deposited by reactive magnetron sputtering

Engineering & Materials Science

• Reactive sputtering 100%
• Magnetron sputtering 84%
• Structural analysis 64%
• Coatings 47%
• Auger electron spectroscopy 24%
• Transmission electron microscopy 24%
• Substrates 16%
• Energy dispersive spectroscopy 16%
• X ray diffraction 15%
• Chemical analysis 15%
• Depth profiling 12%
• High resolution transmission electron microscopy 12%
• Lattice constants 11%
• Diffraction patterns 11%
• Electron diffraction 10%
• Sputtering 10%
• Gas mixtures 8%
• Grain boundaries 7%
• Glass 6%
• Silicon 6%
• Microstructure 5%

Physics & Astronomy

• structural analysis 68%
• magnetron sputtering 53%
• coatings 42%
• transmission electron microscopy 20%
• Auger spectroscopy 15%
• electron spectroscopy 15%
• high resolution 9%
• cross sections 9%
• spectroscopy 8%
• gas mixtures 7%
• x rays 7%
• lattice parameters 6%
• electron diffraction 6%
• diffraction patterns 6%
• sputtering 6%
• grain size 5%
• grain boundaries 5%
• atmospheres 5%
• energy 4%
• microstructure 4%
• glass 4%
• profiles 4%
• silicon 4%
• diffraction 4%

Chemical Compounds

• Magnetron Sputtering 73%
• Coating Agent 37%
• Liquid Film 30%
• Auger Electron Spectroscopy 17%
• Energy-Dispersive Spectroscopy 16%
• Transmission Electron Microscopy 10%
• Depth Profiling 9%
• Selected Area Electron Diffraction 9%
• TEM Image 8%
• Grain Boundary 8%
• X-Ray Diffraction 7%
• Glass Substrate 7%
• Lattice Parameter 7%
• Grain Size 7%
• Microstructure 5%
• Gas 4%
• Reduction 3%
• Mixture 3%
• Surface 2%