@inproceedings{7d498a553cad418bbae8bbe9524761ee,
title = "Structural and electrophysical properties of femtosecond laser exposed hydrogenated amorphous silicon films",
abstract = "This paper studies the effect of femtosecond laser treatment in air of hydrogenated amorphous silicon thin films (a-Si:H) on their structural, electrical and photoelectric properties. The possibility of laser-induced crystallization of a-Si:H films with controlled crystalline volume fraction was shown. A sufficient increase of dark conductivity was observed for laser treated a-Si:H films which crystallinity exceeds 7%. Such increase was attributed to change in conductivity mechanism. However, spectral dependences of absorption coefficient did not show any qualitative changes with the laser fluence increase. It was found that spallation and oxidation of the film took place when laser fluence became reasonably high.",
keywords = "Amorphous silicon, Femtosecond laser crystallization",
author = "Emelyanov, {Andrey V.} and Khenkin, {Mark V.} and Kazanskii, {Andrey G.} and Forsh, {Pavel A.} and Kashkarov, {Pavel K.} and Lyubin, {Evgeny V.} and Khomich, {Andrey A.} and Mindaugas Gecevicius and Martynas Beresna and Kazansky, {Peter G.}",
year = "2012",
month = jun,
day = "12",
doi = "10.1117/12.922896",
language = "English",
isbn = "9780819491305",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Photonics for Solar Energy Systems IV",
note = "Photonics for Solar Energy Systems IV ; Conference date: 16-04-2012 Through 18-04-2012",
}