Structural and electrophysical properties of femtosecond laser exposed hydrogenated amorphous silicon films

Andrey V. Emelyanov, Mark V. Khenkin, Andrey G. Kazanskii, Pavel A. Forsh, Pavel K. Kashkarov, Evgeny V. Lyubin, Andrey A. Khomich, Mindaugas Gecevicius, Martynas Beresna, Peter G. Kazansky

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Scopus citations

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Engineering

Material Science