Structural evolution of Ti/TiC multilayers

I. Dahan; N. Frage; M. P. Dariel

doi:10.1063/1.1689002

Structural evolution of Ti/TiC multilayers

I. Dahan, N. Frage, M. P. Dariel

Department of Materials Engineering

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

The structural evolution of (Ti/TiC) multilayers was discussed. The multilayers consisting of 30 equithick (40 nm)TiC layers and 20 and 60 nm thick Ti layers were sputter deposited on Mo substrates. The structural and the compositional evolution of the multilayers were examined. The thermal effects associated with both with the transformations of Ti layers into TiC due to the influx of carbon atoms were also elaborated.

Original language	English
Pages (from-to)	4662-4669
Number of pages	8
Journal	Journal of Applied Physics
Volume	95
Issue number	9
DOIs	https://doi.org/10.1063/1.1689002
State	Published - 1 May 2004

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.1689002

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@article{97e586748c3540babc079e07324de3a4,

title = "Structural evolution of Ti/TiC multilayers",

abstract = "The structural evolution of (Ti/TiC) multilayers was discussed. The multilayers consisting of 30 equithick (40 nm)TiC layers and 20 and 60 nm thick Ti layers were sputter deposited on Mo substrates. The structural and the compositional evolution of the multilayers were examined. The thermal effects associated with both with the transformations of Ti layers into TiC due to the influx of carbon atoms were also elaborated.",

author = "I. Dahan and N. Frage and Dariel, {M. P.}",

year = "2004",

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journal = "Journal of Applied Physics",

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T1 - Structural evolution of Ti/TiC multilayers

AU - Dahan, I.

AU - Frage, N.

AU - Dariel, M. P.

PY - 2004/5/1

Y1 - 2004/5/1

N2 - The structural evolution of (Ti/TiC) multilayers was discussed. The multilayers consisting of 30 equithick (40 nm)TiC layers and 20 and 60 nm thick Ti layers were sputter deposited on Mo substrates. The structural and the compositional evolution of the multilayers were examined. The thermal effects associated with both with the transformations of Ti layers into TiC due to the influx of carbon atoms were also elaborated.

AB - The structural evolution of (Ti/TiC) multilayers was discussed. The multilayers consisting of 30 equithick (40 nm)TiC layers and 20 and 60 nm thick Ti layers were sputter deposited on Mo substrates. The structural and the compositional evolution of the multilayers were examined. The thermal effects associated with both with the transformations of Ti layers into TiC due to the influx of carbon atoms were also elaborated.

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U2 - 10.1063/1.1689002

DO - 10.1063/1.1689002

M3 - Article

AN - SCOPUS:2442510048

SN - 0021-8979

VL - 95

SP - 4662

EP - 4669

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 9

ER -

Structural evolution of Ti/TiC multilayers

Abstract

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