Structural evolution of Ti/TiC multilayers

I. Dahan, N. Frage, M. P. Dariel

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

The structural evolution of (Ti/TiC) multilayers was discussed. The multilayers consisting of 30 equithick (40 nm)TiC layers and 20 and 60 nm thick Ti layers were sputter deposited on Mo substrates. The structural and the compositional evolution of the multilayers were examined. The thermal effects associated with both with the transformations of Ti layers into TiC due to the influx of carbon atoms were also elaborated.

Original languageEnglish
Pages (from-to)4662-4669
Number of pages8
JournalJournal of Applied Physics
Volume95
Issue number9
DOIs
StatePublished - 1 May 2004

ASJC Scopus subject areas

  • General Physics and Astronomy

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