Structural, optical and photoelectric properties of hydrogenated polymorphous silicon

M. Khenkin, A. Kazanskii, A. Emelyanov, P. Forsh, K. H. Kim, R. Cariou, P. Roca I Cabarrocas

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


We have studied structural, electrical, photoelectric and optical properties of two series of polymorphous silicon thin films deposited by PECVD with variation of silane and hydrogen gas mixture pressure and substrate temperature. The change of gas pressure did not affect substantially films' Raman spectra, but resulted in changes of photoconductivity values and spectral dependencies of absorption coefficient measured by constant photocurrent method. Observed changes in films' optical and photoelectric parameters are associated with the presence of Si nanocrystals in the film structure as revealed by TEM. Substrate temperature did not affect substantially polymorphous silicon films structure and properties in annealed state, but increasing of the substrate temperature led to a formation of the material with enhanced stability against photoinduced degradation. Electron paramagnetic resonance spectra of polymorphous silicon samples showed signal with g=1,998. Possible nature of the signal is discussed.

Original languageEnglish
Title of host publication39th IEEE Photovoltaic Specialists Conference, PVSC 2013
PublisherInstitute of Electrical and Electronics Engineers
Number of pages5
ISBN (Print)9781479932993
StatePublished - 1 Jan 2013
Externally publishedYes
Event39th IEEE Photovoltaic Specialists Conference, PVSC 2013 - Tampa, FL, United States
Duration: 16 Jun 201321 Jun 2013

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)0160-8371


Conference39th IEEE Photovoltaic Specialists Conference, PVSC 2013
Country/TerritoryUnited States
CityTampa, FL


  • Absorption
  • Amorphous materials
  • Photoconductivity
  • Polymorphous silicon
  • Staebler-Wronski effect

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering


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