Abstract
The invention relates to an input or output facet for an on- chip optical waveguide, the facet comprising a grid of gradually expanding unit-cells such as cones or pyramids.
| Original language | English |
|---|---|
| Patent number | WO2020157741 |
| IPC | H01L 33/ 22 A I |
| Priority date | 28/01/19 |
| State | Published - 6 Aug 2020 |