Abstract
The invention relates to an input or output facet for an on- chip optical waveguide, the facet comprising a grid of gradually expanding unit-cells such as cones or pyramids.
Original language | English |
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Patent number | WO2020157741 |
IPC | H01L 33/ 22 A I |
Priority date | 28/01/19 |
State | Published - 6 Aug 2020 |