Study of the mechanical properties of crystals for surface acoustic wave force sensors

S. I. Rokhlin, M. I. Rokhlin, L. Kornblit, G. Gorodetsky

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Abstract

Results are summarized for an investigation into the static and fatigue strength parameters of quartz and silicon crystals used in surface acoustic wave sensors. Testing and instrumentation systems used in the experiment are described and illustrated. Strength depended significantly on surface finish. Results for fracture toughness for variously cut crystal faces are listed. The dynamic range and resolution of the sensors and the role of strain in these properties were assessed. Wave velocities were also measured.

Original languageEnglish
Title of host publicationReview of Progress in Quantitative Nondestructive Evaluation
Pages697-704
Number of pages8
Volume7 A
StatePublished - 1 Dec 1988
Externally publishedYes

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