Synthetic spatial coherence function for optical tomography and profilometry: Influence of the observation condition

Zhihui Duan; Hirokazu Kozaki; Yoko Miyamoto; Joseph Rosen; Mitsuo Takeda

doi:10.1117/12.559139

Synthetic spatial coherence function for optical tomography and profilometry: Influence of the observation condition

Zhihui Duan, Hirokazu Kozaki, Yoko Miyamoto, Joseph Rosen, Mitsuo Takeda

Department of Electrical & Computer Engineering

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

We address the basic issue of the observation condition in a synthetic coherence function applied to optical tomography and profilometry, which has not been made clear in previous papers. We present a more general theory for interference fringe formation for spatial coherence control with a synthetic source. The generalized theory predicts the existence of the observation condition that can make the measurement insensitive to the tilt of the object, which will open the new possibility of measuring objects with rough surfaces. We present experimental results that quantitatively verify the validity of the principle and the prediction.

Original language	English
Article number	27
Pages (from-to)	236-243
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5531
DOIs	https://doi.org/10.1117/12.559139
State	Published - 1 Dec 2004
Event	Interferometry XII: Techniques and Analysis - Denver, CO, United States Duration: 2 Aug 2004 → 3 Aug 2004

Keywords

Coherence control
Observation condition
Optical tomography
Profilometry
Spatial coherence

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.559139

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title = "Synthetic spatial coherence function for optical tomography and profilometry: Influence of the observation condition",

abstract = "We address the basic issue of the observation condition in a synthetic coherence function applied to optical tomography and profilometry, which has not been made clear in previous papers. We present a more general theory for interference fringe formation for spatial coherence control with a synthetic source. The generalized theory predicts the existence of the observation condition that can make the measurement insensitive to the tilt of the object, which will open the new possibility of measuring objects with rough surfaces. We present experimental results that quantitatively verify the validity of the principle and the prediction.",

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author = "Zhihui Duan and Hirokazu Kozaki and Yoko Miyamoto and Joseph Rosen and Mitsuo Takeda",

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TY - JOUR

T1 - Synthetic spatial coherence function for optical tomography and profilometry

T2 - Interferometry XII: Techniques and Analysis

AU - Duan, Zhihui

AU - Kozaki, Hirokazu

AU - Miyamoto, Yoko

AU - Rosen, Joseph

AU - Takeda, Mitsuo

PY - 2004/12/1

Y1 - 2004/12/1

N2 - We address the basic issue of the observation condition in a synthetic coherence function applied to optical tomography and profilometry, which has not been made clear in previous papers. We present a more general theory for interference fringe formation for spatial coherence control with a synthetic source. The generalized theory predicts the existence of the observation condition that can make the measurement insensitive to the tilt of the object, which will open the new possibility of measuring objects with rough surfaces. We present experimental results that quantitatively verify the validity of the principle and the prediction.

AB - We address the basic issue of the observation condition in a synthetic coherence function applied to optical tomography and profilometry, which has not been made clear in previous papers. We present a more general theory for interference fringe formation for spatial coherence control with a synthetic source. The generalized theory predicts the existence of the observation condition that can make the measurement insensitive to the tilt of the object, which will open the new possibility of measuring objects with rough surfaces. We present experimental results that quantitatively verify the validity of the principle and the prediction.

KW - Coherence control

KW - Observation condition

KW - Optical tomography

KW - Profilometry

KW - Spatial coherence

UR - http://www.scopus.com/inward/record.url?scp=15744380988&partnerID=8YFLogxK

U2 - 10.1117/12.559139

DO - 10.1117/12.559139

M3 - Conference article

AN - SCOPUS:15744380988

SN - 0277-786X

VL - 5531

SP - 236

EP - 243

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 27

Y2 - 2 August 2004 through 3 August 2004

ER -

Synthetic spatial coherence function for optical tomography and profilometry: Influence of the observation condition

Abstract

Keywords

ASJC Scopus subject areas

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