@inproceedings{03112871e3914f3f8e356d5588011fc9,
title = "Systematic design of MEMS resonators for optimal nonlinear dynamic response",
abstract = "We report on the first experimental demonstration of an effective and systematic control over the mechanical contribution to the Duffing nonlinearity in micro-electromechanical (MEMS) resonators using nonlinear shape optimization methods. A set of microbeams with selected variable geometry profiles optimized for in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The minimization of the cubic term in the resonator stiffness resulted in a substantial increase of the resonator linear range.",
author = "Li, {Lily L.} and Polunin, {Pavel M.} and Suguang Dou and Oriel Shoshani and Strachan, {B. Scott} and Jensen, {Jakob S.} and Shaw, {Steven W.} and Turner, {Kimberly L.}",
note = "Publisher Copyright: {\textcopyright} 2016 TRF; 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 ; Conference date: 05-06-2016 Through 09-06-2016",
year = "2016",
month = jan,
day = "1",
doi = "10.31438/trf.hh2016.118",
language = "English",
series = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
publisher = "Transducer Research Foundation",
pages = "444--447",
editor = "Allen, {Mark G.} and Tina Lamers",
booktitle = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
}