@inproceedings{03112871e3914f3f8e356d5588011fc9,
title = "Systematic design of MEMS resonators for optimal nonlinear dynamic response",
abstract = "We report on the first experimental demonstration of an effective and systematic control over the mechanical contribution to the Duffing nonlinearity in micro-electromechanical (MEMS) resonators using nonlinear shape optimization methods. A set of microbeams with selected variable geometry profiles optimized for in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The minimization of the cubic term in the resonator stiffness resulted in a substantial increase of the resonator linear range.",
author = "Li, {Lily L.} and Polunin, {Pavel M.} and Suguang Dou and Oriel Shoshani and Strachan, {B. Scott} and Jensen, {Jakob S.} and Shaw, {Steven W.} and Turner, {Kimberly L.}",
note = "Funding Information: This work was supported by NSF grant 442550-22031-FGKT10-2, CMU/DAPPA grant 8-442550-59085-FGKT11-2 and ERC Starting grant 279529 (INNODYN). The content of the information does not necessary reflect the position or the policy of the Government and no official endorsement should be inferred. Travel support has been generously provided by the Transducer Research Foundation. In addition, the authors would like to thank Brian Gibson for his support in fabrications. Publisher Copyright: {\textcopyright} 2016 TRF; 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 ; Conference date: 05-06-2016 Through 09-06-2016",
year = "2016",
month = jan,
day = "1",
doi = "10.31438/trf.hh2016.118",
language = "English",
series = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
publisher = "Transducer Research Foundation",
pages = "444--447",
editor = "Allen, {Mark G.} and Tina Lamers",
booktitle = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
}