Systematic design of MEMS resonators for optimal nonlinear dynamic response

Lily L. Li, Pavel M. Polunin, Suguang Dou, Oriel Shoshani, B. Scott Strachan, Jakob S. Jensen, Steven W. Shaw, Kimberly L. Turner

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report on the first experimental demonstration of an effective and systematic control over the mechanical contribution to the Duffing nonlinearity in micro-electromechanical (MEMS) resonators using nonlinear shape optimization methods. A set of microbeams with selected variable geometry profiles optimized for in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The minimization of the cubic term in the resonator stiffness resulted in a substantial increase of the resonator linear range.

Original languageEnglish
Title of host publication2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
EditorsMark G. Allen, Tina Lamers
PublisherTransducer Research Foundation
Pages444-447
Number of pages4
ISBN (Electronic)9781940470023
DOIs
StatePublished - 1 Jan 2016
Externally publishedYes
Event2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States
Duration: 5 Jun 20169 Jun 2016

Publication series

Name2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Conference

Conference2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
Country/TerritoryUnited States
CityHilton Head
Period5/06/169/06/16

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