Ta-C micro-composite material formed by heat treatment of plasma carburized layer

A. Raveh, A. Rubinshtein, M. Weiss, M. H. Mintz, J. E. Klemberg-Sapieha, L. Martinu

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


Tantalum-carbon micro-composite material (MCM) was produced by a process which combines plasma carburizing and heat treatment. The fabrication was performed in inductively coupled radio-frequency plasma, using CH 4-H2-Ar mixtures, followed by a two-step heat treatment which includes solid solution and aging. The crystallography, microstructure and composition of the intermediate layers and of the MCMs were characterized by X-ray diffraction, scanning electron microscopy, energy-dispersive analysis and atomic force microscopy. The mechanical properties of the layers and of the MCMs were studied by laterally resolved depth-sensing indentation. It was found that the size and hardness within the recrystallized grains and carbon-rich grain boundaries are strongly related to the composition and thickness of the initial carburized layer. The mechanisms involved in the different process steps, in particular redistribution of Ta-C compounds and carbon diffusion towards the film bulk, are discussed.

Original languageEnglish
Pages (from-to)151-157
Number of pages7
JournalThin Solid Films
Issue number1-2
StatePublished - 1 Nov 2004
Externally publishedYes


  • Carbon
  • Grain boundary
  • Hardness
  • Heat treatment
  • Micro-composite
  • Microstructure
  • Plasma carburizing
  • Tantalum
  • Tantalum carbide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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