Abstract
Integrating arrayed biosensors (biochips) or micro- and nanofluidic devices with readout systems is an important step towards their realization in lab-on-a-chip devices. To this end, we present a straightforward method of fabricating polymer microlenses in precise locations, with desired optical characteristics, using a combination of two methods: surface energy tuning using low-energy electron irradiation, to control the numerical aperture, and time-controlled nanofountain pen deposition of polymer microlenses, to control the focal length. The authors demonstrate the tuning of focal length between 8 and 20 μm with numerical apertures between 0.16 and 0.26.
Original language | English |
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Article number | 203106 |
Journal | Applied Physics Letters |
Volume | 90 |
Issue number | 20 |
DOIs | |
State | Published - 28 May 2007 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)