Tailoring the nonlinear response of MEMS resonators using shape optimization

Keyphrases

• Angular Rate 50%
• Bridge Type 50%
• Duffing Nonlinearity 50%
• Fold Increase 50%
• In-plane Vibration 50%
• Mass Sensing 50%
• Measurement Accuracy 50%
• Mechanical Nonlinearity 50%
• MEMS Resonator 100%
• Microbeam 50%
• Micromechanics 50%
• Non-uniform Profile 50%
• Nonlinear Characteristics 50%
• Nonlinear Response 100%
• Nonlinearity 100%
• Resonator 50%
• Shape Change 50%
• Shape Optimization 100%
• Systematic Control 50%
• Timekeeping 50%
• Uniform Beam 50%
• Variable Profile 50%

Engineering

• Bridge Type 25%
• Experimental Result 25%
• Fold Increase 25%
• Microelectromechanical System 100%
• Nonlinear Response 100%
• Nonlinearity 100%
• Optimization Method 25%
• Resonator 100%
• Shape Change 25%

Material Science

• Microelectromechanical System 100%
• Resonator 100%