The effect of a diffusion reaction on the elastic properties of thin films

S. I. Rokhlin; Z. Ronen; M. P. Dariel

doi:10.1016/0040-6090(82)90433-3

The effect of a diffusion reaction on the elastic properties of thin films

S. I. Rokhlin
, Z. Ronen
, M. P. Dariel

Department of Materials Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

We have obtained an approximate solution for the velocity of a surface acoustic wave (SAW) in a system consisting of an arbitrary number of plane parallel isotropic layers on an isotropic substrate. This solution is used for estimating the elastic properties of an Au/Al thin film diffusion couple. The changes in the phase velocity of the surface wave during annealing of an Au/Al diffusion couple were measured. The effective elastic parameter of the intermetallic compound Au₂Al, formed during the diffusion anneal, is estimated on the basis of the experimental data. Using the experimentally measured variations in the velocity of the SAW we were able to calculate the changes in thickness of the intermetallic compound layer.

Original language	English
Pages (from-to)	109-114
Number of pages	6
Journal	Thin Solid Films
Volume	89
Issue number	2
DOIs	https://doi.org/10.1016/0040-6090(82)90433-3
State	Published - 12 Mar 1982

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/0040-6090(82)90433-3

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title = "The effect of a diffusion reaction on the elastic properties of thin films",

abstract = "We have obtained an approximate solution for the velocity of a surface acoustic wave (SAW) in a system consisting of an arbitrary number of plane parallel isotropic layers on an isotropic substrate. This solution is used for estimating the elastic properties of an Au/Al thin film diffusion couple. The changes in the phase velocity of the surface wave during annealing of an Au/Al diffusion couple were measured. The effective elastic parameter of the intermetallic compound Au2Al, formed during the diffusion anneal, is estimated on the basis of the experimental data. Using the experimentally measured variations in the velocity of the SAW we were able to calculate the changes in thickness of the intermetallic compound layer.",

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AU - Rokhlin, S. I.

AU - Ronen, Z.

AU - Dariel, M. P.

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Y1 - 1982/3/12

N2 - We have obtained an approximate solution for the velocity of a surface acoustic wave (SAW) in a system consisting of an arbitrary number of plane parallel isotropic layers on an isotropic substrate. This solution is used for estimating the elastic properties of an Au/Al thin film diffusion couple. The changes in the phase velocity of the surface wave during annealing of an Au/Al diffusion couple were measured. The effective elastic parameter of the intermetallic compound Au2Al, formed during the diffusion anneal, is estimated on the basis of the experimental data. Using the experimentally measured variations in the velocity of the SAW we were able to calculate the changes in thickness of the intermetallic compound layer.

AB - We have obtained an approximate solution for the velocity of a surface acoustic wave (SAW) in a system consisting of an arbitrary number of plane parallel isotropic layers on an isotropic substrate. This solution is used for estimating the elastic properties of an Au/Al thin film diffusion couple. The changes in the phase velocity of the surface wave during annealing of an Au/Al diffusion couple were measured. The effective elastic parameter of the intermetallic compound Au2Al, formed during the diffusion anneal, is estimated on the basis of the experimental data. Using the experimentally measured variations in the velocity of the SAW we were able to calculate the changes in thickness of the intermetallic compound layer.

UR - https://www.scopus.com/pages/publications/0019540898

U2 - 10.1016/0040-6090(82)90433-3

DO - 10.1016/0040-6090(82)90433-3

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SP - 109

EP - 114

JO - Thin Solid Films

JF - Thin Solid Films

IS - 2

ER -

The effect of a diffusion reaction on the elastic properties of thin films

Abstract

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