Abstract
The effect of the real rate of deposition on the superconducting properties and structure of tin films deposited in vacuum on room-temperature amorphous substrates has been observed and studied for rates in the 5-200 AA s -1 range. It is suggested that the oxygen contamination coefficient K, and thus film purity, changes with the rate of deposition. At higher rates, above 100 AA s-1, pure smooth films were obtained, suitable for the fabrication of superconducting tunnel junctions.
| Original language | English |
|---|---|
| Article number | 020 |
| Pages (from-to) | 1781-1785 |
| Number of pages | 5 |
| Journal | Journal Physics D: Applied Physics |
| Volume | 12 |
| Issue number | 10 |
| DOIs | |
| State | Published - 1 Dec 1979 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films