The hidden productivity: How to get more out of your equipment

Adar Kalir, Yair Nahum, Andy Sharon

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

In this paper, we present the use of a system aimed at improving the productivity of equipment, piloted at an Intel production facility for 300mm 45nm high volume manufacturing. We show that true toolset utilizations may be significantly lower than what is recorded, owing to various process and tool-related delays that occur during the tool 'busy' or 'running' state. We then demonstrate through a pilot case study how these delays were reduced by 37% and variation in delay was reduced 17-40% as well. This improvement represents an equivalent of up to 3-4% improvement in true utilization, far more than any single project or even aggregation of projects on the roadmap for availability improvement.

Original languageEnglish
Title of host publication2012 SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012
Pages354-358
Number of pages5
DOIs
StatePublished - 23 Jul 2012
Externally publishedYes
Event2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012 - Saratoga Springs, NY, United States
Duration: 15 May 201217 May 2012

Publication series

NameASMC (Advanced Semiconductor Manufacturing Conference) Proceedings
ISSN (Print)1078-8743

Conference

Conference2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012
Country/TerritoryUnited States
CitySaratoga Springs, NY
Period15/05/1217/05/12

Keywords

  • capacity
  • effective utilization
  • equipment productivity

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Engineering (all)
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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