The hidden productivity: How to get more out of your equipment

Adar Kalir; Yair Nahum; Andy Sharon

doi:10.1109/ASMC.2012.6212926

The hidden productivity: How to get more out of your equipment

Adar Kalir, Yair Nahum, Andy Sharon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In this paper, we present the use of a system aimed at improving the productivity of equipment, piloted at an Intel production facility for 300mm 45nm high volume manufacturing. We show that true toolset utilizations may be significantly lower than what is recorded, owing to various process and tool-related delays that occur during the tool 'busy' or 'running' state. We then demonstrate through a pilot case study how these delays were reduced by 37% and variation in delay was reduced 17-40% as well. This improvement represents an equivalent of up to 3-4% improvement in true utilization, far more than any single project or even aggregation of projects on the roadmap for availability improvement.

Original language	English
Title of host publication	2012 SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012
Pages	354-358
Number of pages	5
DOIs	https://doi.org/10.1109/ASMC.2012.6212926
State	Published - 23 Jul 2012
Externally published	Yes
Event	2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012 - Saratoga Springs, NY, United States Duration: 15 May 2012 → 17 May 2012

Publication series

Name	ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings
ISSN (Print)	1078-8743

Conference

Conference	2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012
Country/Territory	United States
City	Saratoga Springs, NY
Period	15/05/12 → 17/05/12

Keywords

capacity
effective utilization
equipment productivity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
General Engineering
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/ASMC.2012.6212926

Cite this

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title = "The hidden productivity: How to get more out of your equipment",

abstract = "In this paper, we present the use of a system aimed at improving the productivity of equipment, piloted at an Intel production facility for 300mm 45nm high volume manufacturing. We show that true toolset utilizations may be significantly lower than what is recorded, owing to various process and tool-related delays that occur during the tool 'busy' or 'running' state. We then demonstrate through a pilot case study how these delays were reduced by 37% and variation in delay was reduced 17-40% as well. This improvement represents an equivalent of up to 3-4% improvement in true utilization, far more than any single project or even aggregation of projects on the roadmap for availability improvement.",

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Kalir, A, Nahum, Y & Sharon, A 2012, The hidden productivity: How to get more out of your equipment. in 2012 SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012., 6212926, ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, pp. 354-358, 2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012, Saratoga Springs, NY, United States, 15/05/12. https://doi.org/10.1109/ASMC.2012.6212926

The hidden productivity: How to get more out of your equipment. / Kalir, Adar; Nahum, Yair; Sharon, Andy.
2012 SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2012. 2012. p. 354-358 6212926 (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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The hidden productivity: How to get more out of your equipment

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Access to Document

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Cite this