The impact of the structural dimensions and optical properties of bulk material on the optical performance of diffraction microstructures: Crystalline silicon gratings and applications

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Abstract

This paper examines the impact of the structural dimensions and optical properties of the bulk material on the optical performance of gratings and microstructures. We present a brief summary of a rigorous electromagnetic diffraction analysis, and the S-matrix propagation algorithm we have developed. Infrared spectral transmission measurements in the range 2.5-25 μm, along with a rigorous full-vector simulation, are presented. Good agreement between theory and experiment is obtained. The optical performances of various optical devices incorporating grating structures are presented. Such devices include narrow-band filters and polarizers, and three-dimensional photonics band-gap structures.

Original languageEnglish
Pages (from-to)641-644
Number of pages4
JournalJournal of Materials Science: Materials in Electronics
Volume14
Issue number10-12
DOIs
StatePublished - 1 Oct 2003

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