Abstract
The thermal spectral emission properties of three types of periodic grating structure were investigated: (1) a lightly doped (intrinsic-like) silicon grating, (2) a degenerate (metallic-like) silicon grating, and (3) silicon gratings coated with nickel metal. The structural dimensions of all samples were the same, with feature sizes comparable to the measurement wavelengths (2.5-25μm). The measurement temperatures for all samples were in the range 27-740°C. In general, it was found that the spectral emission of the metallic-like gratings depended on the parameters of the grating material and on the structural dimensions. A spectral oscillation in the wavelength range comparable to the structural dimension was observed.
| Original language | English |
|---|---|
| Pages (from-to) | 781-782 |
| Number of pages | 2 |
| Journal | Journal of Materials Science: Materials in Electronics |
| Volume | 14 |
| Issue number | 10-12 |
| DOIs | |
| State | Published - 1 Oct 2003 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering