Thermalization-reaction-capture model for low dose active ion bombardment. I. Diffusionless case

Moshe H. Mintz, Yangsun Jo, J. Wayne Rabalais

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


A diffusionless thermalization-reaction-capture model has been developed and applied to active ion bombardment experiments. The model describes the product concentration distributions in the target as a function of active ion dose and energy specifically for low ion dose or initial bombardment conditions. Analytical expressions are derived for the reduced slopes of the AES or XPS intensities vs ion dose curves. Comparison of these theoretical reduced slopes with experimental plots yields a reaction probability for the specific ion/target combination. Plots are presented in the form of reduced parameters so that they can be used to predict the experimental slopes for various reactant ion/target combinations. Qualifications of the model as well as experimental examples are discussed.

Original languageEnglish
Pages (from-to)5145-5150
Number of pages6
JournalJournal of Chemical Physics
Issue number10
StatePublished - 1 Jan 1983
Externally publishedYes

ASJC Scopus subject areas

  • General Physics and Astronomy
  • Physical and Theoretical Chemistry


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