Thermalization-reaction-capture model for low dose active ion bombardment. II. Fast diffusion case

Moshe H. Mintz, Yangsun Jo, J. Wayne Rabalais

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


A thermalization-reaction-capture model for low dose active ion bombardment which has been treated recently for the diffusionless case has been extended to include fast irradiation-enhanced diffusion in the near-surface region. Analytical expressions are derived for the reduced slopes of the AES or XPS intensities vs ion dose curves for a given ion primary energy and ion/target combination. Comparison of these theoretical reduced slopes with experimental plots yields a nondestructive means for estimating the concentration distributions of the reaction product in the target. In cases when these distributions obey the two extreme possibilities (i.e., the diffusionless case and the fast-diffusion case) the corresponding reaction probabilities may be obtained. Some experimental examples are discussed.

Original languageEnglish
Pages (from-to)1275-1280
Number of pages6
JournalJournal of Chemical Physics
Issue number3
StatePublished - 1 Jan 1985

ASJC Scopus subject areas

  • General Physics and Astronomy
  • Physical and Theoretical Chemistry


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