Three wavelengths parallel phase-shift interferometry for real-time focus tracking and vibration measurement

Michael Ney, Avner Safrani, Ibrahim Abdulhalim

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

Instantaneous high-resolution, wide-range focus tracking and a vibrometry system based on three-wavelength (3λ) parallel phase-shift polarization interferometry using three detectors per wavelength is presented. The system, implementing 3λ in-parallel three-phase-shift-interferometry channels for the first time, to the best of our knowledge, allows single-shot position tracking of motion profiles with extremely high velocities and vibration rates, long inter-step heights, and sub-nanometer scale accuracy. The system's simple design and algorithm presented here do not rely on active optical components, making its performance limited only by the detectors' bandwidths and allowing the setting up of a very high-performance low-cost vibrometry system.

Original languageEnglish
Pages (from-to)719-722
Number of pages4
JournalOptics Letters
Volume42
Issue number4
DOIs
StatePublished - 15 Feb 2017

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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