Three wavelengths parallel phase-shift interferometry for real-time focus tracking and vibration measurement

Keyphrases

• Phase-shifting Interferometry 100%
• Time Focusing 100%
• Vibrometry 100%
• Vibration Measurement 100%
• Track Measurement 100%
• Systems-based 50%
• High Velocity 50%
• Nanometer Scale 50%
• High Performance 50%
• Simple Design 50%
• SIMPLE Algorithm 50%
• High-resolution 50%
• Phase Shift 50%
• Higher Order Mode 50%
• Velocity Rate 50%
• Sub-nanometer 50%
• Position Tracking 50%
• Step Height 50%
• Vibration Rate 50%
• Polarization Interferometry 50%
• Motion Profile 50%
• Active Optical Sensor 50%

Engineering

• Vibration Measurement 100%

Physics

• Tracking (Position) 33%