Time-resolved imaging and simulations of SiO2films dynamic fracture due to laser-induced confined micro-explosion at Si/SiO2interface

Igor Sakaev, John Linden, Amiel A. Ishaaya

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Confined laser-matter interactions can be initiated by short laser pulses either in a transparent medium through nonlinear absorption in the focal region of a tightly focused beam, or at the interface of a film/substrate system, one of which is transparent for laser radiation. In the latter case, a near-interface confined micro-explosion at a certain energetic threshold leads to a localized fracture of the film above the irradiated area. The process was recently studied using 1-4m thick SiO 2 films grown on Si wafers by PECVD [1]. It was noted that at certain conditions, the fracture leads to ejection of a conoid/disk-like flyer, often found intact nearby the irradiation site. This phenomenon is of interest for a relatively novel class of additive microfabrication processes - the laser-induced forward and backward transfer (LIFT and LIBT) of functional materials in solid phase. Flyer ejection during LIBT of solid polymer films was previously studied using time-resolved imaging [2].

Original languageEnglish
Title of host publication2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665418768
DOIs
StatePublished - 1 Jun 2021
Event2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2021 - Munich, Germany
Duration: 21 Jun 202125 Jun 2021

Publication series

Name2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2021

Conference

Conference2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2021
Country/TerritoryGermany
CityMunich
Period21/06/2125/06/21

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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