Towards a new simulation testbed for semiconductor manufacturing

Michael Hassoun, Adar Kalir

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

We propose the creation of a new set of fab simulation testbeds. Extensions and additional features, not considered in the original MIMAC datasets, shall be incorporated in these new testbeds, thus allowing researchers to evaluate new methodologies with the same frame of reference. To do this, we surveyed the literature and mapped the pertinent research efforts of the past two decades. In this paper, we discuss in detail the various aspects of the new testbeds, in order to receive feedback from the simulation community on the importance of inclusion of some of the items in question; and the verification of the required inclusion of other items. Given the feedback, we aim to generate these testbeds within a year to serve as the new frame of reference for the benefit of the entire semiconductor manufacturing simulation community.

Original languageEnglish
Title of host publication2017 Winter Simulation Conference, WSC 2017
EditorsVictor Chan
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages3612-3623
Number of pages12
ISBN (Electronic)9781538634288
DOIs
StatePublished - 28 Jun 2017
Event2017 Winter Simulation Conference, WSC 2017 - Las Vegas, United States
Duration: 3 Dec 20176 Dec 2017

Publication series

NameProceedings - Winter Simulation Conference
ISSN (Print)0891-7736

Conference

Conference2017 Winter Simulation Conference, WSC 2017
Country/TerritoryUnited States
CityLas Vegas
Period3/12/176/12/17

ASJC Scopus subject areas

  • Software
  • Modeling and Simulation
  • Computer Science Applications

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