Uniaxially strained ZnO/SiO2/Si SAW resonators

S. J. Martin, R. L. Gunshor, R. F. Pierret, G. Gorodetsky

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


Surface-acoustic-wave (SAW) resonators fabricated on a ZnO/SiO2/Si layered medium have been cantilever-mounted. By deflecting the free end of the substrate, uniaxial biasing strains are induced in the SAW resonator. The effect of these static strains on resonant frequency and SAW phase velocity is assessed.

Original languageEnglish
Pages (from-to)1030-1031
Number of pages2
JournalElectronics Letters
Issue number24
StatePublished - 25 Nov 1982


  • Resonators
  • Surface-acoustic-wave devices
  • Ultrasonics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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