Surface-acoustic-wave (SAW) resonators fabricated on a ZnO/SiO2/Si layered medium have been cantilever-mounted. By deflecting the free end of the substrate, uniaxial biasing strains are induced in the SAW resonator. The effect of these static strains on resonant frequency and SAW phase velocity is assessed.
|Number of pages||2|
|State||Published - 25 Nov 1982|
- Surface-acoustic-wave devices
ASJC Scopus subject areas
- Electrical and Electronic Engineering