Abstract
This is devoted to the analysis of the optical performance of movable-beam grating structures with both lateral and paper vertical displacement of the beams. We show that in the vector diffraction domain one can design high-efficiency switches (e.g. between beam transmitter and beamsplitter mode) and modulators for polarized radiation. The devices exhibit a good tolerance to fabrication and mounting errors and a functional flexibility. In addition, by simulating the optical performance of polysilicon micro-electro-mechanical grating structures at a visible wavelength, reported in the literature, we demonstrate that our tools for rigorous electromagnetic simulation of grating structures work well in the scalar-diffraction domain.
Original language | English |
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Pages (from-to) | 160-168 |
Number of pages | 9 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3429 |
DOIs | |
State | Published - 1 Dec 1998 |
Event | Current Developments in Optical Design and Engineering VII - San Diego, CA, United States Duration: 22 Jul 1998 → 23 Jul 1998 |
Keywords
- Diffraction
- Rigorous electromagnetics
- Silicon
- Variable grating devices
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering