Variable gratings for optical switching: Rigorous electromagnetic simulation and design

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Abstract

This is devoted to the analysis of the optical performance of movable-beam grating structures with both lateral and paper vertical displacement of the beams. We show that in the vector diffraction domain one can design high-efficiency switches (e.g. between beam transmitter and beamsplitter mode) and modulators for polarized radiation. The devices exhibit a good tolerance to fabrication and mounting errors and a functional flexibility. In addition, by simulating the optical performance of polysilicon micro-electro-mechanical grating structures at a visible wavelength, reported in the literature, we demonstrate that our tools for rigorous electromagnetic simulation of grating structures work well in the scalar-diffraction domain.

Original languageEnglish
Pages (from-to)160-168
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3429
DOIs
StatePublished - 1 Dec 1998
EventCurrent Developments in Optical Design and Engineering VII - San Diego, CA, United States
Duration: 22 Jul 199823 Jul 1998

Keywords

  • Diffraction
  • Rigorous electromagnetics
  • Silicon
  • Variable grating devices

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